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The 50 series gas mass flow meter is a high-performance, compact and cost-effective product.The product adopts the latest generation of industrial-grade gas flow detection chip, combined with high-speed digital processing circuit and temperature compensation algorithm, and can achieve high-precision gas flow detection within the flow range of minimum 0.1sccm and maximum 1200slm.At the same time, the equipment can provide wired (RS485/4-20mA) and wireless (Wifi/4G/Bluetooth) communication modes, and is equipped with professional gas management software, which is convenient for customers to install and configure in batches, and can meet the needs of laboratory gas metering, gas leakage alarm, etc., and can also replace traditional mechanical flow meters such as floats, rotors, and membranes in industry.
Parameters |
|
Requirements |
Clean,dry and non-corrosive |
Gas type |
Air,N2,O2,Co2,He,H2,CH4,Ar,etc. |
Full scale |
(0~20, 50, 100, 200, 500) sccm (0~1, 5, 10, 50, 100, 200, 500, 800,1000,1200) slm |
Accuracy |
0-20sccm… 50slm,1%FS 2 0-100/200slm,1.5%FS 0-50/800/1000/1200slm, 2%FS |
Range ratio |
100:1 |
Response time |
10ms |
Flow pressure loss |
≤100Pa (Specific range related) |
Repetition accuracy |
±0.2%F.S. |
≤100sccm, 0.01sccm ≤1000sccm and>100sccm, 0.1sccm ≤5slm and>1000sccm, 1sccm>5slm, 10sccm |
|
Leakage rate |
<1e-9pa.m³/sec He |
Max.withstand pressure |
1.6MPa
|
Environmental requirements |
|
Operating temp. |
0~50 ℃ |
Operating humidity |
10%~90%R.H.(No ice or frost) |
Operating pressure |
0~1MPa |
Storage temp. |
-20~85℃ |
Electric parameters |
|
Power voltage |
DC8-24v |
Power consumption |
≤250mW |
Display mode |
LCD screen(refresh rate 100ms)or host computer |
Communication interface |
|
Interface type |
7-core aviation plug |
Analog control |
4~20mA (optional) |
Digital control |
RS485 |
Digital signal(RS485) |
|
Interface type |
7-core aviation plug |
Communication rate |
4800, 9600(default), 14400, 19200, 38400, 56000, 57600, 115200, 128000, 230400, 256000, 460800, 500000 (Can be modified by instructions or host computer) |
Protocol |
RS485(Default Modbus-RTU) |
Address |
1(Default)~250 (Can be modified by instructions or host computer) |
Mechanical parameters |
|
Connector type |
Card sleeve:8mm,12mm, 1/8inch,1/4inch Others are optional. |
Gas contact material |
Aluminum alloy,FKM rubber,Si,Si02, SiO2·xH2O,etc. |
Main material |
Foundation:Aviation aluminum alloy Shell:Aluminum alloy |
Sealing material |
FKM rubber |
Weight |
0.30KG |
Qingdao Xinnovis Microsystem Technology Co., Ltd. is a high-tech enterprise specializing in industrial intelligent sensor chip design, module development, and high-end metering instrument R&D, manufacturing and sales. The company is located in Qingdao International Innovation Park, Laoshan District, Qingdao, adjacent to Shandong University (Qingdao Campus), Ocean University of China, Beihang Institute of Microelectronics, Lanhua Institute of Chinese Academy of Sciences (Qingdao), Qingdao University and other famous universities.
At present, the company focuses on the research and development, manufacturing and sales of gas flow measurement and control chips and modules such as industrial-grade gas flow sensor chips, high-end gas mass flow meters (MFM), mass flow controllers (MFC), and miniature digital anemometers. Through joint strategic partners, it has the world's first-class sensor wafer manufacturing capabilities, and has a 9,000-square-meter packaging and testing workshop, with IS09001, IS014001, 1ATF16949 and other quality management and manufacturing certifications. Related products are widely used in special gas fields such as semiconductors, gas analyzers, brazing/argon arc welding, metrology institutes, laboratories, etc., as well as civil fields such as building ventilation and automobiles. At the same time, the company provides solutions and technology development services for low-power dedicated smart sensors through cooperation with domestic artificial intelligence chip design companies.
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